Introduction  I  Professor  I  Research  l  Member  I  Publication  l  Environment  l  Equipment  l  Lecture

1    2

11. E-beam evaporator

12. Auto-clave

ㆍVariable material deposition for    R&D process (Al, Au, Ni, Ti, SiOx    etc)

 ㆍSterilize equipment and     supplies by subjecting     them to high pressure     saturated steam

12. Spin-coater

13. Furnace

ㆍ Photoresist Resist Coating

ㆍ PN junction for solar cell

ㆍ PN junction for nano     electric device

ㆍ Si, GaAs, Ge  inductively  coupled plasma etching

Copyright ⓒ since 2007 Optoelectronics & Nano Device Laboratory. All rights reserved.