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1. Hot plate

6. Thermal Evaporator

ㆍUsed as a substitute for one of    the burners from an oven range    or the cook top of a stove

ㆍTo heat glassware or its  conte    nts. Some hot plates also    contain a magnetics stirrer, allo    wing the heated liquid to be stirr    ed automatically.

  ㆍMicrofabrication to depo      sit metal films

  ㆍMaking macro-scale      products such as      metalized plastic film.

2. Thermal CVD

7. Wire Bonder

   ㆍ SiN deposition
   ㆍ SiO₂ deposition
   ㆍ Dielectric thin film deposition

   ㆍ Wire bonding for LED        fabrication
   ㆍ Variable wire bonding for        nano device

3. RTA

8. Mask Aliner

   ㆍ Heat treatment for ohmic        contact
   ㆍ Heat treatment for thermal        oxide
   ㆍ Heat treatment for stress        relaxation

   ㆍ Photo lithography for 2        ㎛ - scale devices
   ㆍ Photo lithography for 2        ㎛ - scale R&D

4. RF-Sputter

9. Wet Station

  ㆍ Seed layer metal deposition       for plating process
  ㆍ Metal oxide/nitride deposition       using reactive sputtering
  ㆍ MEMS /NEMS process

  ㆍ Pre-cleaning (acid,       alkali,organic)
  ㆍ Post-cleaning       (PR, organic removal)
  ㆍ Wet etch (oxide, nitride       etch & strip)

5. Probe station

10. LED Measerment

   ㆍ Electrical characteristic        measurement of
       semiconductor devices

  ㆍElectrical and optical ch      aracteristic measurement      of LED

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